О.Yu. GONCHAROV, I.V. SAPEGINA, B.E. PUSHKAREV, R.R. FAJZULIN, V.I. LADYANOV, V.N. GUSKOV, L.H. BALDAEV
The tantalum carbide coatings were obtained using the new method of hydrogen-free low-temperature chemical vapor deposition system «TaBr5 – CCl4 – Cd», carried out of research of their chemical composition and structure.
Key words: CVD, tantalum carbide.
Contacts: E-mail: olaf@nm.ru, E-mail: sainvk@bk.ru, E-mail: pbazhen@yandex.ru, E-mail: las@ftiudm.ru, E-mail: las@ftiudm.ru, E-mail: guskov@igic.ras.ru, E-mail: info@tspc.ru
Pp. 03-10. |
