Engineering Physics Annotation << Back STUDY OF METAL COATINGS SILICON SURFACE I.G. PASHAYEV It is reserched possibility of receipt of multi-layered metallization of Al-NiTi-Pd on the surface of single-crystal silicon n-tipe. It is shown that because of distinction for coeffi - cients of thermal expansion, parameters of silicon lattice and material of the presi-pitable layer of tape can have a different degree of imperfectness. The role of thermoburning is set in forming of border of division Al-NiTi-PdSi/n-Si. On the basis of the got multilayered structures the Schottky diodes are made and their descriptions are studied. Possibility of removal of technological operation on creation of diffusive barrier Ni-Ti, in the case of high-quality contact of PdSi with n-Si is educed. Key words: tape of alloy, microstructure, cracks, border of division, Schottky barrier. Contacts: E-mail: islampashayev@rambler.ru Pp. 48-54.