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Engineering Physics

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Properties of the corundum coverings created on quartz resonators surfaces by high-frequency magnetron scattering
D.S. Sajko, V.V. Ganzha, S.A. Titov, S.A. Soldatenko, B.L. Agapov

In the paper influence of unsaturated wet steam on the corundum thin films created by magnetron scattering. The precision measurements technique of influence of small concentration of wet steam on change of quartz generators oscillation frequency is described. Modeling process of adsorption on a corundum surface carried out within the framework of the extended Hckel method. The estimations of adsorption parameters well agree with known experimental data and the results obtained in works of other authors. Keywords: Adsorption, humidity measurements, the cluster simulation. E-mail: vsu810be@mail.ru

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