Engineering Physics Annotation << Back Simulation methods of nano- and microstructures, devices and systems Vasilev V.А. Orehov D.O. Chernov P.S. The paper is devoted to the problem of nano-and microstructures modeling. Review of the common simulation methods of such systems is given. Presented the idea of multi-scale modeling aimed at combining set of different methods in a unified approach. Describes the methods of quantum mechanics, molecular dynamics, finite element analysis. It is concluded that for the majority of modeling nano systems enough non-relativistic quantum mechanics, which is the solution of the Schrodinger equation in matrix form. Particular attention is paid to the mesoscale modeling and finite elements. The results of simulation of some systems are presented. Key words: nano- and microstructures, nano- and microelectromechanical systems, modeling and simulation, numerical analysis. Contacts: E-mail: opto@bk.ru Pp. 53-61.